Henan Super Machinery Equipment Co.,Ltd
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1000C RTP Rapid Annealing Furnace Halogen Light Tube Heated Vacuum Oven
Application of RTP rapid annealing furnace
This product adopts international advanced manufacturing technology, modelling is novel and reasonable structure; Has been all kinds of the validation sample experiments, and has been widely used in semiconductor device research and development and production, etc
1.To meet the rapid annealing after ion implantation;
2. Also can be used in the ohmic contact fast alloy;
3. Can also be used for annealing silicide alloy, oxide growth;
4. and copper indium gallium selenide photovoltaic applications of selenium deposits such as rapid heat treatment process
Features
SP-1100RTP compact RTP fast annealing furnace is a compact rapid heating treatment tube furnace with 4" quartz tube and vacuum flange, It is special designed for annealing semiconductor or solar cell wafer.
It is heated by 8 Pieces of 10 KW halogen light tube around the chamber. The heating rate can up to max. 50C/second. 51 segments precision temperature controller is built with accuracy +/-1° C. you can control the furnace and monitoring the temperature curve by RS485 plug port and control software .
| Product Name | RTP fast annealing tube furnace |
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Features | 1.Quartz sample holder fixed on movable flange,get sample load easy 2. 76 mm AIN plate on the sample holder,bear sample that needs annealing. 3.Embedded thermal makes sure the temperature uniformed. 4.Adopts PID auto control, 30 segments programmable. Including Over Heat and shock protection. |
| Technical parameter | Input Power: 208 V~240 V 50/60 HZ |
| Furnace structure: Double layer with air cooling fan system | |
| Quartz tube: Outer Diameter, φ110 mm,inner diameter φ103 mm, Length,380 mm | |
| Sample holder: 76 mm | |
| Heating Element: 8 infrared lights,filament length,200 mm. light ring ,φ 10 mm | |
| Thermocouple: K type | |
| Temperature accuracy: ±1 .C | |
| Max Temperature:1100.C,Rated temp,1000.C,time during 1000~1100.C <600s | |
| Max heating rate: 50.C/s Below Rt-800.C, 10.C/min during 800~1000.C | |
| Max cooling rate:60.C/min under 200 mttor,117.C/min under 0.1 MPa | |
| Product dimension | 760 mm* 330 mm* 530 mm, weight: 45 kg |
Standard parts for this tube furnace
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Standard spare parts | 1 | AIN plate | 1 piece |
| 2 | Quartz sample holder | 1 set | |
| 3 | Quartz tube | 1 piece | |
| 4 | Quartz Brick | 4 pcs | |
| 5 | Infrared light | 8 pcs | |
| 6 | Vacuum flange | 1 suit | |
| 7 | High temperature gloves | 1 pair | |
| Optional Spare parts | 1.Vacuum pump 2. Bellows (KF-D25 connection) 3. KF-D25 ,Quick access | ||
Our Warranty :
Warranty: One year limited warranty with lifetime support, excluding heating element damaged by user.
Attention: Any damages caused by the use of corrosive and acidic gases, and any damage from wrong operate and use are not under the coverage of One Year Limited Warranty.